PI普爱 P-518.ZCD 压电Z/尖端/倾斜台

大光圈高动态

应用领域

计量学
干涉测量
光子学/集成光学
光刻
纳米定位
显微镜
样品对齐
微加工
PICMA®压电驱动器使用寿命长

PICMA®压电驱动器是全陶瓷的。这使它们免受湿度和由于泄漏电流增加而导致的故障的影响。PICMA®驱动器的使用寿命比传统的聚合物绝缘驱动器长十。经过验证，1000亿次循环没有一次故障。

电容式传感器具有亚纳米级的分辨率

电容式传感器在不接触的情况下亚纳米级的分辨率进行测量。它们保证运动的卓越线性、长期稳定性和kHz范围内的带宽。

由于零间隙弯曲导体的引导精度高

导体无维护、摩擦和磨损，无需润滑。它们的刚性允许高承载能力，并且对冲击和振动不敏感。它们在广泛的温度范围内工作

自动配置和快速组件交换

机械和控制器可以按需组合和快速交换。所有伺服和线性化参数都存储在机械Dsub连接器的ID芯片中。数字控制器的自校准功能每次控制器开机时都会使用这些数据。

由于并行位置测量，纳米范围内的精度高

所有自由度都相对于单个固定参考进行测量。可以在实时（取决于带宽）内主动补偿轴之间的不希望的串扰（主动）。即使在动态操作中，也能在纳米范围内实现高跟踪精度。

Motion	P-518.TCD	P-518.ZCD	P-518.ZCL	P-528.TCD	P-528.ZCD	P-528.ZCL	Tolerance
Active axes	Z θX θY	Z	Z	Z θX θY	Z	Z
Travel range in Z	100 µm	100 µm	100 µm	200 µm	200 µm	200 µm
Travel range in Z, open loop	140 µm	140 µm	140 µm	240 µm	240 µm	240 µm	±20 %
Rotation range in θX	1 mrad			2 mrad
Rotation range in θY	1 mrad			2 mrad
Rotation range in θX, open loop	1.4 mrad			2.4 mrad			±20 %
Rotation range in θY, open loop	1.4 mrad			2.4 mrad			±20 %
Linearity error in Z	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	typ.
Linearity error in θX	0.15 %			0.15 %			typ.
Linearity error in θY	0.15 %			0.15 %			typ.
Yaw (Rotational crosstalk in θX with motion in Z)	± 25 µrad	± 25 µrad	± 25 µrad	± 50 µrad	± 50 µrad	± 50 µrad	max.
Pitch (Rotational crosstalk in θY with motion in Z)	± 25 µrad	± 25 µrad	± 25 µrad	± 50 µrad	± 50 µrad	± 50 µrad	max.
Roll (Rotational crosstalk in θZ with motion in Z)	± 5 µrad	± 5 µrad	± 5 µrad	± 10 µrad	± 10 µrad	± 10 µrad	max.
Positioning	P-518.TCD	P-518.ZCD	P-518.ZCL	P-528.TCD	P-528.ZCD	P-528.ZCL	Tolerance
Bidirectional repeatability in Z	5 nm	5 nm	5 nm	10 nm	10 nm	10 nm	typ.
Bidirectional repeatability in θX	0.05 µrad			0.1 µrad			typ.
Bidirectional repeatability in θY	0.05 µrad			0.1 µrad			typ.
Resolution in Z, open loop	0.4 nm	0.2 nm	0.2 nm	0.6 nm	0.6 nm	0.6 nm	typ.
Resolution in θX, open loop	0.04 µrad			0.06 µrad			typ.
Resolution in θY, open loop	0.04 µrad			0.06 µrad			typ.
Integrated sensor	Capacitive, indirect position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, indirect position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring
System resolution in Z	0.8 nm	0.8 nm	0.8 nm	1 nm	1 nm	1 nm
System resolution in θX	0.05 µrad			0.1 µrad
System resolution in θY	0.05 µrad			0.1 µrad
Drive Properties	P-518.TCD	P-518.ZCD	P-518.ZCL	P-528.TCD	P-528.ZCD	P-528.ZCL	Tolerance
Drive type	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®
Electrical capacitance in Z	2.1 µF	8.4 µF	8.4 µF	3.7 µF	14.8 µF	14.8 µF	±20 %
Mechanical Properties	P-518.TCD	P-518.ZCD	P-518.ZCL	P-528.TCD	P-528.ZCD	P-528.ZCL	Tolerance
Stiffness in Z	2.7 N/µm	2.7 N/µm	2.7 N/µm	1.5 N/µm	1.5 N/µm	1.5 N/µm	±20 %
Resonant frequency in Z, unloaded	500 Hz	500 Hz	500 Hz	350 Hz	350 Hz	350 Hz	±20 %
Resonant frequency in Z, under load with 500 g	350 Hz	350 Hz	350 Hz	210 Hz	210 Hz	210 Hz	±20 %
Resonant frequency in Z, under load with 2500 g	200 Hz	200 Hz	200 Hz	130 Hz	130 Hz	130 Hz	±20 %
Resonant frequency in θX, unloaded	530 Hz			390 Hz			±20 %
Resonant frequency in θX, under load with 500 g	370 Hz			250 Hz			±20 %
Resonant frequency in θX, under load with 2500 g	190 Hz			115 Hz			±20 %
Resonant frequency in θY, unloaded	530 Hz			390 Hz			±20 %
Resonant frequency in θY, under load with 500 g	370 Hz			250 Hz			±20 %
Resonant frequency in θY, under load with 2500 g	190 Hz			115 Hz			±20 %
Permissible push force in Z	50 N	50 N	50 N	50 N	50 N	50 N	max.
Permissible pull force in Z	40 N	40 N	40 N	40 N	40 N	40 N	max.
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification
Overall mass	1400 g	1400 g	1400 g	1420 g	1420 g	1420 g
Material	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum
Miscellaneous	P-518.TCD	P-518.ZCD	P-518.ZCL	P-528.TCD	P-528.ZCD	P-528.ZCL	Tolerance
Operating temperature range	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C
Connector	D-sub 25W3 (m)	D-sub 7W2 (m)	LEMO LVPZT	D-sub 25W3 (m)	D-sub 7W2 (m)	LEMO LVPZT
Cable length	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m
Recommended controllers / drivers	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754

Z方向允许的推/拉力：水平安装（站在表面上，不悬挂）时。

电容量：按通道指定（用户手册中的引脚分配）。

系统的分辨率仅受放大器的噪声和测量技术的限制，因为PI压电纳米定位系统是无摩擦的。
所有规格基于室温（22°C ±3°C）。

PI普爱 P-518.ZCD 压电Z/尖端/倾斜台

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