Number of active axes

6

12

Rough positioning

Active axes

X, Y, Z

Travel range in X, Y, Z

25, 25, 25

mm

Minimum incremental motion

3

µm

Max. velocity

20

mm/s

Sensor typ2

Rotary encoder

Guide

Crossed roller guide

Drive type

DC motor

Fine positioning

Active axes

X, Y, Z

Travel range in X, Y, Z, closed loop

100

µm

Min. incremental motion, open-loop

0.3

nm

Min. incremental motion, closed-loop

2.5

nm

Linearity error, for the entire travel range*

2

%

Repeatability (bidirectional) 10% travel range

2

nm

Sensor type

Incremental

Drive type

PICMA®

Alignment

Scanning time of spiraled area scan 500 µm Ø**

< 3

< 6

s

Scanning time of spiraled area scan 100 µm Ø*

< 0.3

< 1

s

Scanning time of spiraled area scan 10 µm Ø**

< 0.2

< 0.5

s

Signal optimization with gradient search, randomized with ±5 µm (repeatability < 0.01 dB)***

< 0.3

s

Operating temperature range, mechanics

-20 to 65

°C

Operating temperature range, controller

5 to 40

°C

Cable length

3

m

Output signal

Analog output, ideally converted from linear to logarithmic

Output voltage range, max.

-5 bis 5

V

Bandwidth, min.

1

kHz

Noise level, max.

-60

dBm