Number of active axes

9

18

9

Rough positioning

Active axes

X, Y, Z, θ_X, θ_Y, θ_Z

Travel range in X, Y, Z

±6,5, ±16, ±8,5

±17, ±16, ±6,5

mm

Travel range in θ_X, θ_Y, θ_Z

±14,5, ±10, ±10

±10, ±10, ±21

°

Minimum incremental motion in X, Y

0.1

µm

Minimum incremental motion in Z

0.1

0.05

Max. velocity

10

mm/s

Sensor type

Incremental rotary encoder

Drive type

Brushless DC motor

Fine positioning

Active axes

X, Y, Z

Travel range in X, Y, Z, closed loop

100

µm

Min. incremental motion, open-loop

0.3

nm

Min. incremental motion, closed-loop

2.5

nm

Linearity error, for the entire travel range*

2

%

Repeatability (bidirectional) 10% travel range

2

nm

Sensor type

Incremental linear encoder

Drive type

PICMA®

Alignment

Scanning time of spiraled area scan 500 µm Ø**

< 2

< 5

< 2

s

Scanning time of spiraled area scan 100 µm Ø**

< 0.3

< 1

< 0.3

s

Scanning time of spiraled area scan 10 µm Ø**

< 0.2

< 0.5

< 0.2

s

Signal optimization with gradient search, randomized with ±5 µm (repeatability < 0.01 dB)***

< 0.3

s

Operating temperature range, mechanics

0 to 50

°C

Operating temperature range, controller

5 to 40

°C

Cable length

2

m

Output signal

Analog output, ideally converted from linear to logarithmic

Output voltage range, max.

-5 to 5

V

Bandwidth, min.

1

kHz

Noise level, max.

-60

dBm